stepper lithography machine photoetching machine mask aligner
Application of time - optimal auto - alignment system in DSW photolithog - raphic process is investigated in this paper.
本文研究了最 短时 问控制系统在DSW光刻机自动对准系统中的应用问题。
—— 给力词典精选A novel method for measuring - line depth of focus ( DOF ) of a lithographic projection system is proposed.
提出了一种检测光刻机投影物镜密集线焦深 ( DOF ) 的新技术。
—— 给力词典精选The principle and implementation of high precision video based alignment system are described.
阐述高分辨力光刻机的图像对准系统的原理及实现过程。
—— 给力词典精选A novel in - situ non - flatness measurement method of wafer chuck in step - and - scan projection lithographic tool is presented.
提出一种步进扫描投影 光刻机 承片台不平度检测新技术。
—— 给力词典精选Nikon is also reversing its losses in lithography.
另外,尼康光刻机业务也开始扭亏为盈。
—— 给力词典精选