abbr.微电子机械系统(Micro-electromechanicalSystems)
网络 微机电系统(Micro-Electro-Mechanical Systems); 微电子机械系统(Micro Electro Mechanical System); 微电机系统
The progress of MEMS was introduced and prospected.
介绍了微机电系统当前的进展与发展前景。
The optimization of the MEMS fabrication process is analyzed.
分析了MEMS制作工艺的改进。
LIGA technology play a very important role in the fabrication of MEMS.
LIGA技术在微机械结构的制作中具有很重要的作用。
The characteristic size of MEMS components is from micron to millimeter.
MEMS器件的特征尺寸范围为几微米到几毫米。
The kernel problem in virtual MEMS fabrication process is process model.
MEMS加工工艺的核心是工艺模型。